Setting up [Fine matching]

Set up [Fine Matching] in the follow steps.

Note

Operations of the ProcItem Setting window

For the basic operations of the ProcItem Setting window, see User's Manual, "Operations of ProcItem Setting Window".

Tap [Fine matching] in the Edit Flow window.
The "Procitem Setting" window is displayed.
User's Manual, "ProcItem Setting Window"
The window opens with [Model] selected, so that you register the model as a pattern characteristic of the measurement object.
[Model (Fine matching)]
In the "Item tab" area, tap [Measurement] and specify the judgement condition for OK.
[Measurement (Fine Matching)]
Tap [OK].
After confirmation, the ProcItem Setting window will be closed.
Perform a measurement test.
User's Manual, "Test Measurement before Actual Operation"
Verify measurement results.
User's Manual, "Display of the RUN Window"
When NG is displayed, please verify measurement results and make adjustment if necessary.
Points on Measurement Test and Adjustment (Fine Matching)

Note

Specify [Boundary inspection] in [Model] and [Inspection] in [Measurement] depending on situations as follows.