Setting up [Search]

Set up search according to the following flow.
Search - Operation FlowDetection point Reference Position Output Parameter Model Region Setting Measurement
Note
Operations of the ProcItem Setting window
  1. In the Edit Flow window, tap [Search].
    The ProcItem Setting window is displayed.
  2. The window opens with [Model] selected, so that you register the model as a pattern characteristic of the measurement object.
  3. In the "Item tab" area, tap [Region setting] and specify the measurement region.
  4. In the "Item tab" area, tap [Measurement] and specify the judgement condition for OK.
    Important
    • After setting up the measurement, changing the output parameters will cause measurement results to vary accordingly. If the output parameters have been changed, re-specify the measurement parameters, too.
  5. Tap [OK].
    After confirmation, the ProcItem Setting window will be closed.
  6. Perform measurement test.
  7. Verify measurement results.
    When NG is displayed, please verify measurement results and make Adjust if necessary.