Setting up [ECM Search]

The setting procedure for [ECM Search] is as follows:

Note

Operations of the ProcItem Setting window

For the basic operations of the ProcItem Setting window, see User's Manual, "Operations of ProcItem Setting Window".

In the Edit Flow window, tap [ECM Search].
The ProcItem Setting window is displayed.
User's Manual, "ProcItem Setting Window"
The window opens with [Model] selected, so that you register the model as a pattern characteristic of the measurement object.
[Model (ECM Search)]
In the "Item tab" area, tap [Region setting] and specify the measurement region.
[Region Setting (ECM Search)]
In the "Item tab" area, tap [Measurement] and specify the judgement condition for OK.
[Measurement (ECM Search)]
Important
- After setting up the measurement, changing the output parameters will cause measurement results to vary accordingly. If the output parameters have been changed, re-specify the measurement, too.
Tap [OK].
After confirmation, the ProcItem Setting window will be closed.
Perform a measurement test.
User's Manual, "Test Measurement before Actual Operation"
Verify measurement results.
User's Manual, "Display of the RUN Window"
When "NG" is displayed, verify measurement results and make adjustments if necessary.
Points on Test Measurement and Adjustment (ECM Search)