Setting up [ECM Search]

The setting procedure for [ECM Search] is as follows:
ECM Search - Operation FlowOutput parameter Model Region setting Measurement Detection point Reference position Error Model
Note
Operations of the ProcItem Setting window
  1. In the Edit Flow window, tap [ECM Search].
    The ProcItem Setting window is displayed.
  2. The window opens with [Model] selected, so that you register the model as a pattern characteristic of the measurement object.
  3. In the "Item tab" area, tap [Region setting] and specify the measurement region.
  4. In the "Item tab" area, tap [Measurement] and specify the judgement condition for OK.
    Important
    • After setting up the measurement, changing the output parameters will cause measurement results to vary accordingly. If the output parameters have been changed, re-specify the measurement, too.
  5. Tap [OK].
    After confirmation, the ProcItem Setting window will be closed.
  6. Perform a measurement test.
  7. Verify measurement results.
    When "NG" is displayed, verify measurement results and make adjustments if necessary.