Monitoring Measurement Value Trends

By monitoring the trend in measurement values, the occurrence of defects can be prevented in advance and this information can also be helpful in NG error occurrence cause analysis.Use the processing item [Trend Monitor] to monitor the measurement values.
Illustration of warning range settings
Note
  • If the measurement value is within the alarm range, the "Warning" message is shown on the screen.
  • If a result output-related processing item is used, this allows for output to external devices when a warning occurs.
  • Through trend monitor judgement, trends can be managed and NG error images can be saved.
    To save only NG error images identified by trend monitor judgement, create settings so that overall judgements from processing units other than [Trend Monitor] are not included in judgement.