Measurement accuracy depends much upon pixels (resolution) of camera, Inspection and measurement objects, etc.

This section explains how to perform measurement and how the inspection object influences the precision of the measurement.

The measurement precision varies depending on the processing unit.

"Fine Matching" indicates the Processing Items with higher measurement accuracy. However, the higher the measurement accuracy, the longer the measurement time. When selecting Processing Items, particular attentions shall be paid to measurement accuracy, measurement time and measurement objects.
Shortening Measurement Time by Setting Processing Item

Measurement accuracy differs from different measurement objects.

High-precision measurement is impossible when using low-contrast images, or the background has patterns during defect measurement. In such case, measurement accuracy could be improved by processing the measurement images in advance.
Filtering Required for Stable Measurement