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| | | 0: No judgement (unmeasured) |
| | Get only | |
| | Get only | |
| | Get only | |
| | Get only | |
| | Get only | |
| | Get only | |
| | Get only | -1 to dist (X_MAX, Y_MAX) |
| | Get only | -1 to dist (X_MAX, Y_MAX) |
| | Get only | -1 to dist (X_MAX, Y_MAX) |
| | Get only | -1 to dist (X_MAX, Y_MAX) |
| | Get only | -1 to dist (X_MAX, Y_MAX) |
| | Get only | |
| | Get only | |
| | Get only | -99999.9999 to 99999.9999 |
| | Get only | -99999.9999 to 99999.9999 |
| | Get only | -99999.9999 to 99999.9999 |
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| Reflect to overall judgement | | |
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| Upper limit of the maximum edge position X | | -99999.9999 to 99999.9999 |
| Lower limit of the maximum edge position X | | -99999.9999 to 99999.9999 |
| Upper limit of the maximum edge position Y | | -99999.9999 to 99999.9999 |
| Lower limit of the maximum edge position Y | | -99999.9999 to 99999.9999 |
| Upper limit of the minimum edge position X | | -99999.9999 to 99999.9999 |
| Lower limit of the minimum edge position X | | -99999.9999 to 99999.9999 |
| Upper limit of the minimum edge position Y | | -99999.9999 to 99999.9999 |
| Lower limit of the minimum edge position Y | | -99999.9999 to 99999.9999 |
| Upper limit of the edge position X Ave. | | -99999.9999 to 99999.9999 |
| Lower limit of the edge position X Ave. | | -99999.9999 to 99999.9999 |
| Upper limit of the edge position Y Ave. | | -99999.9999 to 99999.9999 |
| Lower limit of the edge position Y Ave. | | -99999.9999 to 99999.9999 |
| Upper limit of the long distance Max. | | |
| Lower limit of the long distance Max. | | |
| Upper limit of the short distance Max. | | |
| Lower limit of the short distance Max. | | |
| Upper limit of the deviation | | |
| Lower limit of the deviation | | |
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| Upper limit of the lost point | | |
| Lower limit of the lost point | | |
| Monochrome edge detection mode | | 0: Light→Dark 1: Dark→Light |
| Edge level absolute value | | |
| Edge level specification method | | |
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166 | Measure type | Set/Get | 0: Projection, 1: Derivation |
167 | Area division method | Set/Get | 0: Do not fix number of area divisions 1: Fix the number of area divisions |