Measurement items | Character string | Description |
---|---|---|
Judgement | JG | Judgement result |
Defect | F | Measured defect level |
Measurement coordinate X | X | X Coordinate of measured defect position |
Measurement coordinate Y | Y | Y coordinate of measured defect position |
Defect area | AR | The measured maximum defect area |
Gravity X | GX | The center of gravity X coordinates of the measured maximum defect area |
Gravity Y | GY | The center of gravity Y coordinates of the measured maximum defect area |