Key Points for Test Measurement and Adjustment (High-precision Defects/Contamination Detection)

Key Points for Test Measurement and Adjustment (Precise Defect)

The following content is displayed in the "Detail result" area as text.

Displayed items	Description
Judge	Judgement result
Defect value	Measured defect level
Defect X	X Coordinate of measured defect position
Defect Y	Y coordinate of measured defect position
Area	The measured maximum defect area
Gravity X	Center of gravity X coordinate of the measured maximum defect area
Gravity Y	Center of gravity Y coordinate of the measured maximum defect area

Key Points for Adjustment

Select the adjustment method referring to the following points.

When the measurement results are unstable

Noise is detected as defects.

Parameter to be adjusted	Remedy
Measurement	Specify a larger value for "Defect judge" in the judgement conditions.

Judgement will be NG.

Parameter to be adjusted	Remedy
Measurement	Make the measurement region larger than the value of the element size.

When the processing speed is slow

Parameter to be adjusted	Remedy
Measurement	Specify a larger value for the element creation interval.