Defects/Contamination

No.	Data name	Set/Get	Data range
0	Judge	Get only	0: No judgement (unmeasured) 1: Judgement result OK -1: Judgement result NG
5	Defect	Get only	0 to 999
6	Position X	Get only	0 to 99999.9999
7	Position Y	Get only	0 to 99999.9999
8	Defect area	Get only	0 to 999999999.9999
9	Defect gravity X	Get only	0 to 99999.9999
10	Defect gravity Y	Get only	0 to 99999.9999
103	Reflect to overall judgement	Set/Get	0: ON 1: OFF
120	Upper limit of defect size	Set/Get	0:4 1:8 2:12 3:16 4:24 5:32 6:64
121	Lower limit of defect size	Set/Get	0:4 1:8 2:12 3:16 4:24 5:32 6:64
122	Defect judgement	Set/Get	0 to 999
123	Defect color	Set/Get	0: Both, 1: White, 2: Black
124	Area measurement	Set/Get	0: OFF, 1: ON
125	Area meas. LV	Set/Get	0 to 999
126	Area judgement	Set/Get	0 to 999999999.9999