Model Registration

This item registers the pattern characteristic of the measurement image as a model.
Model parameter values can be changed as needed to address unstable measurement results or to increase the processing speed.Normally, the factory default value will be used.
Model Registration (Fine Matching)

Diff. image disp.

Modify this setting as necessary when defects cannot be detected successfully.This sets the reference grayscale used when calculating differences between the model and the inspected object image.Normally, the factory default value will be used.

Measurement parameter

This item specifies the judgement condition for measurement results.Specify the criteria to judge the measurement result if the X and Y coordinates and the correlation with the model are OK.
Measurement parameters can be changed as needed to address unstable measurement results or to increase the processing speed.
Measurement Parameters (Fine Matching)

Output parameter

This item can be changed if necessary.Normally, the factory default value will be used.
Use the output parameter to specify how to handle the coordinates.
Output Parameters (Fine Matching)