Measurement Results for Which Output Is Possible (Defects/Contamination)
The following values can be output using processing items related to results output.It is also possible to reference measurement values from expressions and other processing units.
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| | X Coordinate of measured defect position |
| | Y coordinate of measured defect position |
| | The measured maximum defect area |
| | The center of gravity X coordinates of the measured maximum defect area |
| | The center of gravity Y coordinates of the measured maximum defect area |