Key Points for Test Measurement and Adjustment (Defects/Contamination)

Key Points for Test Measurement and Adjustment (Defects/Contamination)

In the "Detail result" area on the Main screen, you can confirm the following contents in text.

Displayed items	Description
Judge	Judgement result
Defect	Measured defect level
Position X	X Coordinate of measured defect position
Position Y	Y coordinate of measured defect position
Defect area	The measured maximum defect area
Gravity X	Center of gravity X coordinate of the measured maximum defect area
Gravity Y	Center of gravity Y coordinate of the measured maximum defect area

Key Points for Adjustment

Select the adjustment method referring to the following points.

When the measurement results are unstable

Noise is detected as defects.

Parameter to be adjusted	Remedy
Measurement parameter	Specify a larger value for "Defect judgement" in the judgement conditions.

Judgement will be NG.

Parameter to be adjusted	Remedy
Measurement parameter	Make the measurement region larger than the lower limit of the defect size.Or make the lower limit of the defect detection size smaller than the measurement region.

When the processing speed is slow

Parameter to be adjusted	Remedy
Measurement parameter	Specify a larger value for the "Defect size".
Measurement parameter	Reduce the difference between the upper and lower limits of "Defect size".