Measurement Results for Which Output Is Possible (High-precision Defects/Contamination Detection)

The following values can be output using processing items related to results output.It is also possible to reference measurement values from expressions and other processing units.
Measurement items
Character string
Description
Judge
JG
Judgement result
Defect
F
Measured defect level
Position X
X
X Coordinate of measured defect position
Position Y
Y
Y coordinate of measured defect position
Defect area
AR
The measured maximum defect area
Gravity X
GX
The center of gravity X coordinates of the measured maximum defect area
Gravity Y
GY
The center of gravity Y coordinates of the measured maximum defect area