Key Points for Test Measurement and Adjustment (High-precision Defects/Contamination Detection)

The following content is displayed in the "Detail result" area as text.
Displayed items
Description
Judge
Judgement result
Defect
Measured defect level
Position X
X Coordinate of measured defect position
Position Y
Y coordinate of measured defect position
Defect area
The measured maximum defect area
Gravity X
Center of gravity X coordinate of the measured maximum defect area
Gravity Y
Center of gravity Y coordinate of the measured maximum defect area

Key Points for Adjustment

Select the adjustment method referring to the following points.
When the measurement results are unstable
Noise is detected as defects.
Parameter to be adjusted
Remedy
Measurement parameter
Specify a larger value for "Defect judgement" in the judgement conditions.
Judgement will be NG.
Parameter to be adjusted
Remedy
Measurement parameter
Make the measurement region larger than the value of the element size.
When the processing speed is slow
Parameter to be adjusted
Remedy
Measurement parameter
Specify a larger value for the element creation interval.