Defects/Contamination

No.
Data name
Set/Get
Data range
0
Judge
Get only
0: No judgement (unmeasured)
1: Judgement result OK
-1: Judgement result NG
5
Defect
Get only
0 to 999
6
Position X
Get only
0 to 99999.9999
7
Position Y
Get only
0 to 99999.9999
8
Defect area
Get only
0 to 999999999.9999
9
Gravity X
Get only
0 to 99999.9999
10
Gravity Y
Get only
0 to 99999.9999
103
Reflect to overall judgement
Set/Get
0: ON 1: OFF
120
Upper limit of defect size
Set/Get
0:4
1:8
2:12
3:16
4:24
5:32
6:64
121
Lower limit of defect size
Set/Get
0:4
1:8
2:12
3:16
4:24
5:32
6:64
122
Defect judgement
Set/Get
0 to 999
123
Defect color
Set/Get
0: Both, 1: White, 2: Black
124
Area measurement
Set/Get
0: OFF, 1: ON
125
Area meas. LV
Set/Get
0 to 999
126
Area judgement
Set/Get
0 to 999999999.9999