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| | | 0: No judgement (unmeasured) |
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| Reflect to overall judgement | | |
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| Upper limit of the edge position X | | -99999.9999 to 99999.9999 |
| Lower limit of the edge position X | | -99999.9999 to 99999.9999 |
| Upper limit of the edge position Y | | -99999.9999 to 99999.9999 |
| Lower limit of the edge position Y | | -99999.9999 to 99999.9999 |
| Monochrome edge detection mode | | |
| Edge level absolute value | | |
| Edge level specification method | | |
| Clockwise/Counterclockwise | | 0: Clockwise, 1: Counterclockwise |
144 | Measure type | Set/Get | 0: Projection, 1: Derivation |