Defect Measurement

Find defect, stain and spots by changing the color within measurement region.

After drawing a measurement region, a rectangle is automatically formed in this area ("Defect detection" area). Move the "Defect detection" area, calculate separately the mean concentration, and obtain the detection difference with surrounding defect (referred to as defect level). Then, calculate defect level with all "Defect detection" areas. If the maximum value exceeds the criteria value, there are defect in measurement region.

Increasing "Defect detection size" allows to shortening processing time, but will reduce measurement accuracy.

Table: Defect Parameters
Option	Description
Upper Lower	Set the Upper and Lower limit of defect detection size based on the size of stain to be detected. The bigger the difference between Upper and Lower limits, the easier it is possible to detect the defect of various sizes. The bigger the defect detection size, the weaker the measurement sensitivity of Upper and Lower limits and the shorter the processing time.