Measurement Results for Which Output Is Possible (Defects/Contamination)

Measurement Results for Which Output Is Possible (Defect)

The following values can be output using processing items related to results output.It is also possible to reference measurement values from expressions and other processing units.

Measurement items	Character string	Description
Judgement	JG	Judgement result
Defect	F	Measured defect level
Position of defect	X	X Coordinate of measured defect position
Position of defect	Y	Y coordinate of measured defect position
Defect area	AR	The measured maximum defect area
Defect gravity	GX	The center of gravity X coordinates of the measured maximum defect area
Defect gravity	GY	The center of gravity Y coordinates of the measured maximum defect area